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==Doping with boron==
=Doping with Boron=
 
''This section is written by DTU Nanolab  internal''


The Boron Drive-in and Pre-dep furnace (A1) can be used to pre-deposit/dope silicon wafers with boron.  
The Boron Drive-in and Pre-dep furnace (A1) can be used to pre-deposit/dope silicon wafers with boron.  
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