Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*One wafer at a time | *One wafer at a time | ||
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*One wafer at a time but you can | *One wafer at a time but you can load a whole batch of 25 wafers and set up an individual for each one | ||
|-valign="top" | |-valign="top" | ||
|'''Allowed materials''' | |'''Allowed materials''' | ||