Specific Process Knowledge/Process Flow: Difference between revisions
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== Substrate == | == Substrate == | ||
Generally, there is a wide range of substrates available for cleanroom processing. This includes silicon, fused silica, III-V substrates, SOI wafers, but also rarer and more expensive materials such as silicon carbide, saphire, and diamond are possible. In some occasions, even different types of polymer can be processed at DTU Nanolab. | Generally, there is a wide range of substrates available for cleanroom processing. This includes silicon, fused silica, III-V substrates, SOI wafers, but also rarer and more expensive materials such as silicon carbide, saphire, and diamond are possible. In some occasions, even different types of polymer can be processed at DTU Nanolab. | ||