Specific Process Knowledge

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

Feedback to this page: click here

New Layout for Labadviser: THIS PART IS STILL UNDER CONSTRUCTION

General

• Home

• Safety

• Discussion with Sina regarding merging the info with www.nanolab.dtu.dk

• Labmanager

• How to purchase wafers: there is double information, under "Labmanager" and under "Wafer Information"

• Contact Information

• maybe change of title required "Mailboxes" or similar (contact information is twice, emails and then the phone numbers (with layouts))
• add phone numbers of staff (list from the cleanroom but without mobile numbers) ???

• Training Videos

• Technology Research (hide this until better updated?)

Characterization (B307/314)

• Overview Building 314/307

• include office phone numbers?

• Getting Started (New PAGE) (NOT DONE YET)

• Safety 314-307 (as part of "Safety" or a "Getting started”-page)

• Preparation

• Microscopy

Fabrication & Characterization (B346/347)

• Overview Building 346/347 (or "Layout and Phones/Contacts", or new page)

• include office phone numbers?

• Getting Started

• Tool Package Training (rename? Equipment Training Packages)

• The Process Flow

• Cross-Contamination

• Pattern Design and Mask Fabrication (rename? shorter?)

• Wafer Information

• Overview of Fume Hoods (rename? Chemical Fume Hoods]

• List of chemicals available in the cleanroom (rename? Cleanroom Chemicals)

Processes and Characterization (Methods) ???

• Back-end processing

• Bonding

• Characterization

• Direct Structure Definition (change content or remove sub-point)

• Doping

• Etch (rename: Etching)

• Imprinting (move to "Polymer Processing")

• Lithography

• Polymer Processing (new page)

• Thermal Process (rename "Thermal Processing")

• Thin film deposition

• Wafer and sample drying (rename "Wafer/Substrate Cleaning")

• Wafer Cleaning (rename "Wafer/Substrate Drying")

(maybe combine cleaning and drying?)

Contacts

• Administration
• Fabrication Support
• Microscopy Support
• LabAdviser
• Layout and Contacts (B314/ 307)
• Layout and Contacts (B346/347)
• www.nanolab.dtu.dk