Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | ||
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== Scanning Electron Microscopes (SEM)== | == Scanning Electron Microscopes (SEM)== | ||