Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
| Line 4: | Line 4: | ||
<br> | <br> | ||
<br> | <br> | ||
= Sample imaging = | |||
In the cleanroom at DTU Nanolab a number of instruments are available for sample imaging, including several optical microscopes, and optical profiler, a number of SEMs (scanning electron microscopes), an AFM (atomic force microscope) and two stylus profilers (Dektak). | In the cleanroom at DTU Nanolab a number of instruments are available for sample imaging, including several optical microscopes, and optical profiler, a number of SEMs (scanning electron microscopes), an AFM (atomic force microscope) and two stylus profilers (Dektak). | ||