Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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==Thin film thickness== | ==Thin film thickness== | ||
The profilers can be used to measure the thickness of optically transparent thin films or etched non-transparent thin films. There are also other options for measuring film thickness. All the methods are compared on the [[Specific Process Knowledge/Characterization/Measurement of | The profilers can be used to measure the thickness of optically transparent thin films or etched non-transparent thin films. There are also other options for measuring film thickness. All the methods are compared on the [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants| "Measurement of Thin Film Thickness and Optical Constants"]] page. | ||
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=Comparison of stylus profilers, optical profilers and AFMs at Nanolab= | =Comparison of stylus profilers, optical profilers and AFMs at Nanolab= | ||