Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 5: | Line 5: | ||
At DTU Nanolab we have eight systems for topographic measurements: | At DTU Nanolab we have eight systems for topographic measurements: | ||
*Stylus profilers (P17, Dektak XTA, Dektak 150 and Dektak 3ST) - ''Profilers for measuring | *Stylus profilers (P17, Dektak XTA, Dektak 150 and Dektak 3ST) - ''Profilers for mechanically measuring topography'' | ||
*Optical profilers (Optical profiler Sensofar and Optical profiler Filmetrics) - ''3D Profilers for measuring | *Optical profilers (Optical profiler Sensofar and Optical profiler Filmetrics) - ''3D Profilers for optically measuring topography'' | ||
*AFMs (AFM Icon-PT1 and AFM Icon-PT2) - ''AFMs for measuring nano | *AFMs (AFM Icon-PT1 and AFM Icon-PT2) - ''AFMs for "mechanically" measuring topography (nano-regime)'' | ||
==High aspect ratio structures== | ==High aspect ratio structures== | ||