Jump to content

Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions

← Older editNewer edit →
VisualWikitext
No edit summary
Line 35: Line 35:
|
|
*Photoresist
*Photoresist
*E-beam resist
*Silicon Oxide
*Silicon Oxide
*Silicon Nitride
*Silicon Nitride
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Silicon"