Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions
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'''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Apex_software click here]''' | '''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Apex_software click here]''' | ||
[[Category: Equipment|Characterization Profiler]] | [[index.php?title=Category:Equipment|Characterization Profiler]] | ||
[[Category: Characterization|Profiler]] | [[index.php?title=Category:Characterization|Profiler]] | ||
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The user manual, quality control procedure and results, technical information and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 LabManager]. | The user manual, quality control procedure and results, technical information and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 LabManager]. | ||
== Process information == | |||
*Info about [//Dektak_XTA Measurement Accuracy] (''measured with Dektak XTA''). | *Info about [//Dektak_XTA Measurement Accuracy] (''measured with Dektak XTA''). | ||
*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | *Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | ||
*Info about making [https://labmanager.dtu.dk/view_binary.php?fileId=4699 2D stress measurements] ''(requires login)'' | *Info about making [https://labmanager.dtu.dk/view_binary.php?fileId=4699 2D stress measurements] ''(requires login)''. | ||
Most users will want to make 3D stress measurements, which is described in the regular Nanolab manual for the P17, also found on LabManager. It counts as "3D" if you wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan. | |||
== Acceptance test == | |||
*The acceptance test carried out for the P17: [[:File:Acceptance test p17 final_no-names.pdf]] | *The acceptance test carried out for the P17: [[:File:Acceptance test p17 final_no-names.pdf]] | ||
*Vendor's own [https://labmanager.dtu.dk/view_binary.php?fileId=5545 conformity test results] after installation ''(requires login)''. | *Vendor's own [https://labmanager.dtu.dk/view_binary.php?fileId=5545 conformity test results] after installation ''(requires login)''. | ||
=== | ===Performance and Process Parameters=== | ||
[[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]] | [[image:KLA-Tencor P17 profiler.jpg|275x275px|right|thumb|Front of the P17 profiler located in cleanroom F-2.]] | ||
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=Apex software for data analysis= | == Apex software for data analysis == | ||
The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software. | The Tencor-KLA P17 stylus profiler comes with advanced data analysis software called APEX. We have an extra license for the software on a computer in the basement of building 346. The computer is located at the back of room 904 between the XRD Powder and the AFM. At the moment remote access is not possible, but you are able to access your files on the M-drive from the computer. Let us know if you would like us to find a solution for remote access and/or would like us to move the analysis computer to a room with daylight, as we are not sure how many of you would actually like to use the software. | ||
To use Apex, your data must be in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first, which can only be done on the P17 computer in the cleanroom. With the data open or selected, press the Apex button and save it in Apex in a native format. It is also possible to check a box in the scan recipe that makes it possible to open the data in Apex automatically (see the Profiler Help document for more details or ask staff). Finally some data formats (e.g., 3D maps and 3D stress data) can always be opened in Apex. | To use Apex, your data must be in a format that Apex can open. For line profiles that means you have to open the data in the Profiler Software first, which can only be done on the P17 computer in the cleanroom. With the data open or selected, press the Apex button and save it in Apex in a native format. It is also possible to check a box in the scan recipe that makes it possible to open the data in Apex automatically (see the Profiler Help document for more details or ask staff). Finally some data formats (e.g., 3D maps and 3D stress data) can always be opened in Apex. | ||
==How to use the software == | === How to use the software === | ||
[[image:pick-points-drawing.png|500x500px|right|thumb|How to choose to show only the measured line scans rather than the interpolated surface that APEX likes to calculate (see orange arrow). Screenshot by reet, DTU Nanolab, from Apex.]] | [[image:pick-points-drawing.png|500x500px|right|thumb|How to choose to show only the measured line scans rather than the interpolated surface that APEX likes to calculate (see orange arrow). Screenshot by reet, DTU Nanolab, from Apex.]] | ||