Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions
Created page with "==Tencor P17 Stylus Profiler== The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring stress. Compared to the DektakXT, the P17 has more advanced options for stress measurements: It allows the user to measure a stress map with up to 5° radial resolution. Programming and..." |
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===Process information === | ===Process information === | ||
*Info about [[/ | *Info about [[/Dektak XTA|measurement accuracy]] (measured with Dektak XTA). | ||
*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | *Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | ||