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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
1,918 edits
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! rowspan="2" align="center"| Parameter
! rowspan="2" align="center"| Parameter
| colspan="2" align="center"| Process step
! colspan="2" align="center"| Process step
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| width="225" Breakthrough
! width="225" Breakthrough
| width="225" Main
! width="225" Main
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! Time (secs)
! Time (secs)
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