Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 26: | Line 26: | ||
| Main | | Main | ||
|- | |- | ||
! Time (secs) | |||
| 20 | | 20 | ||
| 40 (variable) | | 40 (variable) | ||
|- | |- | ||
! HBr (sccm) | |||
| - | | - | ||
| 15 | | 15 | ||
|- | |- | ||
! Cl<sub>2</sub> (sccm) | |||
| 20 | | 20 | ||
| 25 | | 25 | ||
|- | |- | ||
! Pressure (mTorr) | |||
| 4, Strike 3 secs @ 15 mTorr??? | | 4, Strike 3 secs @ 15 mTorr??? | ||
| 1 | | 1 | ||
|- | |- | ||
! Coil power (W) | |||
| 600 | | 600 | ||
| 500 | | 500 | ||
|- | |- | ||
! Platen power (W) | |||
| 125 | | 125 | ||
| 100 | | 100 | ||
|- | |- | ||
! Temperature (<sup>o</sup>C) | |||
| 20 | | 20 | ||
| 20 | | 20 | ||
|- | |- | ||
! Spacers (mm) | |||
| 30 | | 30 | ||
| 30 | | 30 | ||