Specific Process Knowledge/Back-end processing/Polishing machine: Difference between revisions
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Training is required before using th machine. The machine is equipped with a LabManager lock.--> | Training is required before using th machine. The machine is equipped with a LabManager lock.--> | ||
The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates. | The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates. | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||