Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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== The ICP Metal Etcher in short == | == The ICP Metal Etcher in short == | ||
Despite its name the metal etcher doesn't etch metals in general. Currently, the list of metals that you can etch is quite short | Despite its name the metal etcher doesn't etch metals in general. Currently, the list of metals that you can etch is quite short: | ||
* aluminium | * aluminium | ||
* titanium | * titanium | ||
* chromium | * chromium | ||
Over time it is our intention to add other materials to the list (such as molybdenum, tungsten, titaniumtungsten, titaniumoxides or piezo-materials such as ZnO) but currently the list | |||
==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ||