Specific Process Knowledge/Pattern Design/Mask Specifications: Difference between revisions
Created page with "Below you can find two examples on how to write the specification for 5" and 7" masks. 5" masks All Layers: 5" chromium mask fracture limits ((-50000, -50000),(50000, 50000)) Dark periphery Chromium down GDS-file: GLO006_v7.gds Top cell: wafer Layer (GDS number): 01 Mask Type: Digitised data= Dark, right reading Text(max 30 characters): init-2019-Nitride-etch Layer (GDS number): 02 Mask Type: Digitised data= Clear, Wrong reading Text(max 30 characters): init-2..." |
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== Mask Specifications == | |||
Below you can find two examples on how to write the specification for 5" and 7" masks. | Below you can find two examples on how to write the specification for 5" and 7" masks. | ||
5" masks | == 5" masks == | ||
All Layers: | All Layers: | ||
5" chromium mask | 5" chromium mask | ||
| Line 21: | Line 22: | ||
== For 7" masks == | |||
All Layers: | All Layers: | ||
7" chromium mask | 7" chromium mask | ||
Revision as of 17:24, 27 May 2025
Mask Specifications
Below you can find two examples on how to write the specification for 5" and 7" masks.
5" masks
All Layers: 5" chromium mask fracture limits ((-50000, -50000),(50000, 50000)) Dark periphery Chromium down
GDS-file: GLO006_v7.gds Top cell: wafer
Layer (GDS number): 01 Mask Type: Digitised data= Dark, right reading Text(max 30 characters): init-2019-Nitride-etch
Layer (GDS number): 02 Mask Type: Digitised data= Clear, Wrong reading Text(max 30 characters): init-2019-KOH-backside
For 7" masks
All Layers: 7" chromium mask fracture limits ((-70000, -70000),(70000, 70000)) Dark periphery Chromium down
GDS-file: GLO006_v7.gds Top cell: wafer
Layer (GDS number): 01 Mask Type: Digitised data= Dark, right reading Text(max 30 characters): init-2019-Nitride-etch
Layer (GDS number): 02 Mask Type: Digitised data= Clear, Wrong reading Text(max 30 characters): init-2019-KOH-backside