LabAdviser/Technology Research/Live TEM imaging nanowire growth: Difference between revisions
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Created page with "=''Live TEM imaging of Nanowire growth and device dynamics''= *'''Project type:''' Ph.D project *'''Project responsible:''' Christopher Røhl Andersen *'''Supervisors:''' Kris..." |
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The microdevices are based on a microheater design ([https://doi.org/10.1002/smll.200800366]) and they are fabricated using silicon-on-insulator wafers. The device layer is made by using the maskless aligner at the DTU Nanolab cleanroom followed by a Bosch etching process. Windows are made from the handle using KOH etch and a thin nitride protection layer | The microdevices are based on a microheater design ([https://doi.org/10.1002/smll.200800366]) and they are fabricated using silicon-on-insulator wafers. The device layer is made by using the maskless aligner at the DTU Nanolab cleanroom followed by a Bosch etching process. Windows are made from the handle using KOH etch and a thin nitride protection layer | ||