Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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	== The ~~SPTS~~ ICP Metal Etcher ==		= The ICP Metal Etcher =






	==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus==		==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus==