Specific Process Knowledge/Process Flow: Difference between revisions
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* Optical or mechanical profilometer | * Optical or mechanical profilometer | ||
* Particle Scanner | * Particle Scanner | ||
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=== Chemical Composition and Molecular Interaction === | === Chemical Composition and Molecular Interaction === | ||
''Techniques to identify elemental composition and chemical states, as well as the interaction between molecules, f.ex.'' | ''Techniques to identify elemental composition and chemical states, as well as the interaction between molecules, f.ex.'' | ||
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* SIMS (Secondary Ion Mass Spectrometry) – not available at DTU Nanolab | * SIMS (Secondary Ion Mass Spectrometry) – not available at DTU Nanolab | ||
* Raman Spectroscopy - not available at DTU Nanolab | * Raman Spectroscopy - not available at DTU Nanolab | ||
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=== Optical Properties === | === Optical Properties === | ||
''Analysis of optical properties such as film thickness, optical constants (refractive index, extinction coefficient), reflectivity, and others, f.ex.'' | ''Analysis of optical properties such as film thickness, optical constants (refractive index, extinction coefficient), reflectivity, and others, f.ex.'' | ||
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*Microspectrophotometer | *Microspectrophotometer | ||
*PhotoLuminescence Mapper | *PhotoLuminescence Mapper | ||
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=== Mechanical Properties === | === Mechanical Properties === | ||
''Techniques to measure hardness, elasticity, and stress, f.ex.'' | ''Techniques to measure hardness, elasticity, and stress, f.ex.'' | ||
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*Hardness tester | *Hardness tester | ||
*AFM | *AFM | ||
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=== Electrical Properties === | === Electrical Properties === | ||
''Techniques to evaluate conductivity, resistivity, and carrier behavior, f.ex.'' | ''Techniques to evaluate conductivity, resistivity, and carrier behavior, f.ex.'' | ||
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*Lifetime scanner MDPmap | *Lifetime scanner MDPmap | ||
*AFM | *AFM | ||
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=== Others === | === Others === | ||
* Thermal Properties | * Thermal Properties | ||