Specific Process Knowledge/Process Flow: Difference between revisions
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Examples for Information relevant to a Specific Process Step | |||
Please find below some examples that might help you to create a complete process step. | |||
"Create a Mask on your Sample (Photolithography Step) | |||
** Specify the design/mask-name, -layers, and polarity used for each photolithography step | ** Specify the design/mask-name, -layers, and polarity used for each photolithography step | ||
** Specify if required and type of alignment (frontside, backside), and if relevant note down alignment marks coordinates | ** Specify if required and type of alignment (frontside, backside), and if relevant note down alignment marks coordinates | ||