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| <br> | | <br> |
| <br clear="all"> | | <br clear="all"> |
| ''take out: characterization and process flow examples, exchange direct structuring with polymer processing''
| | <br> |
| | | '''Examples for Information relevant to a Specific Process Step''' |
| * ''Polymer Processing:''
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| ** ''Hot Embossing''
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| ** ''Injection Molding''
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| ** ''Imprinting: Imprinting, specifically Nanoimprint Lithography (NIL), is a polymer replication process involving a resilient stamp to transfer nano- or microscale patterns onto a substrates coated with a liquid or soft thermoplastic film.''
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| ** ''PDMS casting''
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| ** ''3D printing''
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| ** ''2 photon-polymerization (2PP)''
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| '''Some examples for information relevant for a specific process step'''
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| *<u>f.ex. Photolithography</u> | | *<u>f.ex. Photolithography</u> |
| ** Specify the design/mask-name, -layers, and polarity used for each photolithography step | | ** Specify the design/mask-name, -layers, and polarity used for each photolithography step |
