Specific Process Knowledge/Imprinting: Difference between revisions
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Here is a process flow for stamp made of SU8 resist.[[media:Stamp_Fabrication.docx | Stamp fabrication flow.]] | Here is a process flow for stamp made of SU8 resist.[[media:Stamp_Fabrication.docx | Stamp fabrication flow.]] | ||
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= Imprint resist = | = Imprint resist = | ||
{{:Specific Process Knowledge/Lithography/Resist/NILresist | {{:Specific Process Knowledge/Lithography/Resist/NILresist | ||
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==Imprinting parameters== | ==Imprinting parameters== | ||