Specific Process Knowledge/Process Flow: Difference between revisions
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| align="center" style="color:black"| Create a Mask on your Sample [[image:Jehanmask.png|130px|frameless|link=Specific Process Knowledge/Pattern Design|Lithography is a common method to create micro- and nanoscale patterns on a substrate. The process commonly involves (a) coating of the substrate with a UV- or DUV-light, or e-beam sensitive resist; (b) exposure of parts of the pattern; and (c) development.]] | | align="center" style="color:black"| Create a Mask on your Sample [[image:Jehanmask.png|130px|frameless|link=Specific Process Knowledge/Pattern Design|Lithography is a common method to create micro- and nanoscale patterns on a substrate. The process commonly involves (a) coating of the substrate with a UV- or DUV-light, or e-beam sensitive resist; (b) exposure of parts of the pattern; and (c) development.]] | ||
| align="center" style="color:black"| Transfer a Pattern to your Sample [[image:JehanTransfer.png|130px|frameless|link=Specific Process Knowledge/Etch|Etching is used to remove material from the surface of a substrate to create patterns and structures. Often a mask is used to selectively remove material. Etching can be done by using liquid chemicals (wet etching), or gas or plasma (dry etching ).]] | | align="center" style="color:black"| Transfer a Pattern to your Sample [[image:JehanTransfer.png|130px|frameless|link=Specific Process Knowledge/Etch|Etching is used to remove material from the surface of a substrate to create patterns and structures. Often a mask is used to selectively remove material. Etching can be done by using liquid chemicals (wet etching), or gas or plasma (dry etching ).]] | ||
| align="center" style="color:black"| Create your Structures in Polymer [[image:JehanDefine.png| | | align="center" style="color:black"| Create your Structures in Polymer [[image:JehanDefine.png|110px|frameless|link=Specific Process Knowledge/Direct Structure Definition|Structures can be directly created in the device material without an lithography and etch step, though some of the techniques may require a stamp.]] | ||
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