Specific Process Knowledge/Process Flow: Difference between revisions
Created page with "{{cc-nanolab}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Preparation click here]''' <br> <br> =The Process Flow= A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniqu..." |
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* '''[[Specific Process Knowledge/Lithography/DUVStepperLithography/Reticle Design| DUV Lithography]]''' (Reticle Design) | * '''[[Specific Process Knowledge/Lithography/DUVStepperLithography/Reticle Design| DUV Lithography]]''' (Reticle Design) | ||
* '''[[Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL| Electron Beam Lithography]]''' ([[Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation|pattern preparation for Jeol exposure]]) | * '''[[Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL| Electron Beam Lithography]]''' ([[Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation|pattern preparation for Jeol exposure]]) | ||
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