Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Line 8: Line 8:
|-
|-
! colspan="2"| Tool
! colspan="2"| Tool
| align="center" Pegasus
| Pegasus
| colspan="2" align="center"| ASE
| colspan="2"| ASE
|-
|-
! rowspan="6" align="center"| Parameters
! rowspan="6" align="center"| Parameters
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2"