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DTU Nanolab - Building 346/347

Building 346 (cleanroom) and 347, Photo: DTU Nanolab

DTU Nanolab has several locations on the Lyngby campus.

Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).

Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes, and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.

Building 346:

• Ground: Cleanroom
• First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
• Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)

Building 347:

• Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
• First Floor: Offices, Kantine
• Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)

Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at Labmanager under "Basic Info" and "location" for an updated location.

Cleanroom (Ground Floor in B346) - Layout and Contacts

Drawing: DTU CAS Digital

Room number Location Phone number A-1 At III-V RIE 55 804 Ax2 At the Lesker 55 815 A-5 In the corner near the furnace/plasma asher 55 803 B-1 In the corridor, on the wall 55 806 C-1 In the corridor, on the wall 55 808 D-1 In the gowning area (entrance room) 55 703 D-3 At the KOH 55 940 E-1 By the e-beam computers 55 943 E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946 E-6 Furnace 6" 55 948 F-1 III-V growth 55 949 F-2 To the right of the XRD and Ellipsometer 55 941 F-3 DUV Stepper 55 947 Basement 901 Hot Embosser, XRD RotAnode, Laser Micromachining Tool 55 812 Basement 904 To the right of the AFM 55 813

Basement Labs (Basement in B346) - Layout and Contacts

Drawing: DTU CAS Digital

PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts

Drawing: DTU CAS Digital (modified on 21/05/2025)