Specific Process Knowledge

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Choose the process topic you are interested in:

General

• Home

• Safety ???

• Labmanager

• Contact Information (New PAGE)

• Training Videos (New PAGE)

Characterization (B307/314)

• Layout and Phones/Contacts (New PAGE) (currently under “home” as “Characterization (B314/307) - Layout and Contacts”)

• Getting Started (New PAGE) (NOT DONE YET)

• Safety 314-307 ("Safety" as part of “Getting started”)

• Preparation

• Microscopy

Fabrication & Characterization (B346/347)

• Layout and Phones/Contacts (New PAGE) (currently under “home” as “Characterization (B314/307) - Layout and Contacts”)

include office phone numbers?

• Getting Started

• Tool Package Training (rename? Equipment Training Packages)

• The Process Flow (rename, currently "preparation")

• Cross-Contamination

• Pattern Design and Mask Fabrication (rename? shorter?)

• Wafer Information

• Overview of Fume Hoods (rename? Chemical Fume Hoods]

• List of chemicals available in the cleanroom (rename? Cleanroom Chemicals)

Processes and Characterization (Methods) ???

• Back-end processing

• Bonding

• Characterization

• Direct Structure Definition (change content or remove sub-point)

• Doping

• Etch (rename: Etching)

• Imprinting (move to "Polymer Processing")

• Lithography

• Polymer Processing

• Thermal Process (rename "Thermal Processing")

• Thin film deposition

• Wafer and sample drying (rename "Wafer/Substrate Cleaning")

• Wafer Cleaning (rename "Wafer/Substrate Drying")

(maybe combine cleaning and drying?)

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