Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | ||
===Wet etches:=== | ===Wet etches:=== | ||
*KOH | *[[Specific Process Knowledge/Etch/KOH Etch|KOH Etch]] | ||
*Wet PolySilicon etch | *Wet PolySilicon etch | ||