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Specific Process Knowledge/Wafer Information: Difference between revisions

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NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
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Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
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<br>
<br>
<br>
<br>
''SSP: single side polished''<br>
''DSP: double side polished''
{| border="1" style="text-align: center; width: 550px; height: 100px;"
{| border="1" style="text-align: center; width: 550px; height: 100px;"
|colspan="6" style="text-align: center;" style="background: #efefef;" | '''Wafers available in the cleanroom'''
|colspan="6" style="text-align: center;" style="background: #efefef;" | '''Wafers available in the cleanroom'''
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|-
|-
!SSP
!SSP<sup>{{fn|1}}</sup>
|2"
|2"
|P
|P
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|1-20 Ωcm
|1-20 Ωcm
|-
|-
!SSP
!SSP<sup>{{fn|1}}</sup>
|4"
|4"
|N or P
|N or P
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|1-20 Ωcm
|1-20 Ωcm
|-
|-
!SSP
!SSP<sup>{{fn|1}}</sup>
|6"
|6"
|N
|N
Line 47: Line 45:
|10-20 Ωcm
|10-20 Ωcm
|-
|-
!SSP
!SSP<sup>{{fn|1}}</sup>
|8"
|8"
|N
|N
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|1-10 Ωcm
|1-10 Ωcm
|-
|-
!DSP
!DSP<sup>{{fn|2}}</sup>
|4"
|4"
|N or P
|N or P
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|1-20 Ωcm
|1-20 Ωcm
|-
|-
!DSP
!DSP<sup>{{fn|2}}</sup>
|4"
|4"
|N
|N
Line 65: Line 63:
|1-20 Ωcm
|1-20 Ωcm
|-
|-
!DSP
!DSP<sup>{{fn|2}}</sup>
|6"
|6"
|N
|N
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|&nbsp;
|&nbsp;
|-
|-
!pre-processed<sup>{{fn|1}}</sup>
!pre-processed<sup>{{fn|3}}</sup>
|4" and 6"
|4" and 6"
|&nbsp;
|&nbsp;
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|-
|-
|}
|}
 
<sup>{{fn|1}}</sup> ''SSP: single side polished''<br>
<sup>{{fn|1}}</sup> ''Pre-processed wafers are wafers with various thicknesses of thermal oxides, LPCVD nitrides and Poly Si. Please consult the [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=shop&page_id=16| wafer shop in Labmanager]for details.''
<sup>{{fn|2}}</sup> ''DSP: double side polished''<br>
<sup>{{fn|3}}</sup> ''Pre-processed wafers are wafers with various thicknesses of thermal oxides, LPCVD nitrides and Poly Si. Please consult the [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=shop&page_id=16| wafer shop in Labmanager]for details.''
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