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Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions

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The ALD window for titanium dioxide (TiO<sub>2</sub>) ranges from 120 <sup>o</sup>C to 350 <sup>o</sup>C.  
The ALD window for titanium dioxide (TiO<sub>2</sub>) ranges from 120 <sup>o</sup>C to 350 <sup>o</sup>C.  


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Evgeniy Shkondin, DTU Danchip, April-May 2014.
Evgeniy Shkondin, DTU Nanolab (former DTU Danchip), April-May 2014.




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Evgeniy Shkondin, DTU Danchip, 2014.
Evgeniy Shkondin, DTU Nanolab (former DTU Danchip), 2014.