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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Difference between revisions

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{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
|+ '''Recipe nano1.42'''
|-
|-
|
! nano1.42
! pxnano2
|-
! Tool
! Pegasus
! ASE
|-
! rowspan="6" align="center"| Recipe
! rowspan="6" align="center"| Recipe
| Gas
| Gas
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