Specific Process Knowledge/Cross Contamination: Difference between revisions
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[[image:cross_contamination_between.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:cross_contamination_between.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | ||
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To evaluate the viability of your process and cross contamination of your sample, you have to consider | |||
* Is your sample with its particular attributes allowed in the tool? ('''"In"''') | |||
* Does the tool contaminate your sample during processing? ([[image:xcplus.png|15px|frameless|link=]] '''"Out +"''') | |||
* Does the tool remove a particular attribute from your sample during processing? ([[image:xcminus.png|15px|frameless|link=]] '''"Out -"''') | |||
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As you can see from the screenshot above, you are not allowed to process a sample in the "Si Etch 1: KOH" bath (our cleanest KOH etch bath) that has been previously processed in "PECVD03". Your sample might have picked up traces of material list 3, f.ex. silver, gold, or copper during processing in the PECVD03. Since those contaminants can alter the etching process and further contaminate samples processed in "Si Etch 1: KOH", they are forbidden. | |||
== How to use the system in LabManager == | == How to use the system in LabManager == | ||