Specific Process Knowledge/Cross Contamination: Difference between revisions
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Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination. Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample in the respective tool. | Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination. Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample in the respective tool. | ||
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== How to Access the Cross Contamination Sheet == | == How to Access the Cross Contamination Sheet == | ||
Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
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=== Cross Contamination between two Tools === | === Cross Contamination between two Tools === | ||
* commonly the tool you selected is set as default, else click on "Select other equipment" | * commonly the tool you selected is set as default, else click on "Select other equipment" | ||