Specific Process Knowledge/Cross Contamination: Difference between revisions

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 * Does the tool contaminate your sample during processing? ("'''Out +"''')
 * Does the tool remove a particular attribute from your sample during processing? ('''"Out -"''')
-*
-* These are not legal documents – it is an attempt to preserve our tools in known states.
-*
-Always consider the tool to be working and used correctly by a skilled user where a meaningful process has run to completion.
-We expect users
+Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination. Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample in the respective tool.
-Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination.
-Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample.
 == How to Access the Cross Contamination Sheet ==