Specific Process Knowledge/Cross Contamination: Difference between revisions

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-A film type is characterized by the material characteristics of any films on the given sample. A film need not be complete, a part does however need to be more than one atom thick and several nm wide in the plane – if it can be seen in a SEM it is probably a film – if it can be seen in a microscope it is definately a film. There can be more than one film. However, for some process, only the top layer might be important, if buried layers are not exposed during the process. Please contact the thinfilm group, if you have multilayer substrates and you are in doubt if you can process your sample.
+Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination.
+Please contact the equipment responsible group or nanolabsupport@nanolab.dtu.dk, if you have multilayer substrates and you are in doubt if you can process your sample.
 == How to Access the Cross Contamination Sheet ==