Specific Process Knowledge/Cross Contamination: Difference between revisions
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Cross contamination can origin from many different sources, the substrate, film deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have therefore created the sources of contamination into groups: | Cross contamination can origin from many different sources, the substrate, film deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have therefore created the sources of contamination into groups: | ||
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