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Specific Process Knowledge/Cross Contamination: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="10" align="left"
{| border="2" cellspacing="0" cellpadding="10" align="left"
|-
|-
| width="150" align="center" style="color:black" |Substrate [[image:jehanClean.png|130px|frameless|link=|The substrate type is characterized by the bulk material characteristics of the given sample.]]
| width="150" align="center" style="color:black" |Substrate [[image:cross_contamination_substrate.png|130px|frameless|link=|The substrate type is characterized by the bulk material characteristics of the given sample.]]
| width="150" align="center" style="color:black"| Film [[image:JehanDry.png|130px|frameless|link=|A film type is characterized by the material characteristics of any films on the given sample.]]


| width="150" align="center" style="color:black"| Traces [[image:Jehanfilm.png|130px|frameless|link=|A trace type is characterized by the material characteristics of any material found in low concentrations on the given sample.]]
| width="150" align="center" style="color:black"| Film [[image:cross_contamination_multifilm.png|130px|frameless|link=|A film type is characterized by the material characteristics of any films on the given sample.]]


| width="150" align="center" style="color:black"| Miscellaneous [[image:JehanDope.png|130px|frameless|link=|Misc is a dimension used for contaminants which did not fit into other categories]]
| width="150" align="center" style="color:black"| Traces [[image:cross_contamination_trace.png|130px|frameless|link=|A trace type is characterized by the material characteristics of any material found in low concentrations on the given sample.]]
|-


| width="150" align="center" style="color:black"| Miscellaneous [[image:cross_contamination_misc.png|130px|frameless|link=|Misc is a dimension used for contaminants which did not fit into other categories]]


Substrate
|-
 
| width="150" align="left" style="color:black" |Examples:
Film
* silicon
 
* fused silica
Traces
* saphire
 
* silicon carbide
Miscellaneous
| width="150" align="left" style="color:black" |Examples:
 
* photoresist
* metal
* oxide or nitride
* II-V materials
| width="150" align="left" style="color:black" |Examples:
* photoresist
* metal
* oxide or nitride
* II-V materials
| width="150" align="left" style="color:black" |Examples:
* BPSG
* graphene
* nanotubes
* dust
|-
|}


The Substrate


The substrate type is characterized by the bulk material characteristics of the given sample.
Film


A film type is characterized by the material characteristics of any films on the given sample. A film need not be complete, a part does however need to be more than one atom thick and several nm wide in the plane – if it can be seen in a SEM it is probably a film – if it can be seen in a microscope it is definately a film. There can be more than one film. However, for some process, only the top layer might be important, if buried layers are not exposed during the process. Please contact the thinfilm group, if you have multilayer substrates and you are in doubt if you can process your sample.
A film type is characterized by the material characteristics of any films on the given sample. A film need not be complete, a part does however need to be more than one atom thick and several nm wide in the plane – if it can be seen in a SEM it is probably a film – if it can be seen in a microscope it is definately a film. There can be more than one film. However, for some process, only the top layer might be important, if buried layers are not exposed during the process. Please contact the thinfilm group, if you have multilayer substrates and you are in doubt if you can process your sample.
Traces
A trace type is characterized by the material characteristics of any material found in low concentrations on the given sample.
Misc
Misc is a dimension used for contaminants which didn’t fit in the other categories


== How to access the cross contamination sheet ==
== How to access the cross contamination sheet ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Cross_Contamination"