Specific Process Knowledge/Cross Contamination: Difference between revisions
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== Cross Contamination Sheet in LabManager == | == Cross Contamination Sheet in LabManager == | ||
We have created a cross contamination sheet available in labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. | We have created a cross contamination sheet available in labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. | ||
Cross contamination can origin from many different sources, the substrate, film deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have therefore created the sources of contamination into groups: | |||
Substrate | |||
Film | |||
Traces | |||
Miscellaneous | |||
The Substrate | |||
The substrate type is characterized by the bulk material characteristics of the given sample. | |||
Film | |||
A film type is characterized by the material characteristics of any films on the given sample. A film need not be complete, a part does however need to be more than one atom thick and several nm wide in the plane – if it can be seen in a SEM it is probably a film – if it can be seen in a microscope it is definately a film. There can be more than one film. However, for some process, only the top layer might be important, if buried layers are not exposed during the process. Please contact the thinfilm group, if you have multilayer substrates and you are in doubt if you can process your sample. | |||
Traces | |||
A trace type is characterized by the material characteristics of any material found in low concentrations on the given sample. | |||
Misc | |||
Misc is a dimension used for contaminants which didn’t fit in the other categories | |||
== How to access the cross contamination sheet == | |||
''Attention: Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact '''training@nanolab.dtu.dk'''.'' | ''Attention: Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact '''training@nanolab.dtu.dk'''.'' | ||
* Go to the “Equipment Info” page | * Go to the “Equipment Info” page | ||
* Select the tool | * Select the tool | ||
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== How to use the system in LabManager == | == How to use the system in LabManager == | ||
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