Specific Process Knowledge/Cross Contamination: Difference between revisions
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* Click on the button “Cross Contamination Sheet” | * Click on the button “Cross Contamination Sheet” | ||
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[[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:Cross_contamination_location.png | ||
|800px|frameless|link=|Where to find the Cross Contamination Sheet?]] | |||
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[[image:cross_contamination.png|800px|frameless|link=|Example for a cross contamination sheet for the PECVD03]] | |||
As you can see, there is a long list of substrates that can go into the "PECVD03", even with exposed metal films (area exposed < 5%), as long as they do not contain materials from "material list 4", nanotubes, or dust. Polymers are also not allowed in the equipment. | As you can see, there is a long list of substrates that can go into the "PECVD03", even with exposed metal films (area exposed < 5%), as long as they do not contain materials from "material list 4", nanotubes, or dust. Polymers are also not allowed in the equipment. | ||
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=== If you want to see the cross contamination between two tools === | === If you want to see the cross contamination between two tools === | ||
* commonly the tool you selected is set as default, else click on "Select other equipment" | * commonly the tool you selected is set as default, else click on "Select other equipment" | ||