Specific Process Knowledge/Cross Contamination: Difference between revisions
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As you can see, there is a long list of substrates that can go into the "PECVD03", even with exposed metal films (area exposed < 5%), as long as they do not contain materials from "material list 4", nanotubes, or dust. Polymers are also not allowed in the equipment. | As you can see, there is a long list of substrates that can go into the "PECVD03", even with exposed metal films (area exposed < 5%), as long as they do not contain materials from "material list 4", nanotubes, or dust. Polymers are also not allowed in the equipment. | ||
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=== If you want to see the cross contamination between two tools === | === If you want to see the cross contamination between two tools === | ||