Specific Process Knowledge/Cross Contamination: Difference between revisions
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[[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | ||
As you can see, there is a long list of substrates that can go into the "PECVD03", even with exposed metal films (area exposed < 5%), as long as they do not contain materials from "material list 4", nanotubes, or dust. Polymers are also not allowed in the equipment. | |||