Specific Process Knowledge/Cross Contamination: Difference between revisions
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* Select the tool | * Select the tool | ||
* Click on the button “Cross Contamination Sheet” | * Click on the button “Cross Contamination Sheet” | ||
[[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | ||
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* click on "Select "TO" equipment" | * click on "Select "TO" equipment" | ||
[[image:cross_contamination_between.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | |||
As you can see from the overivew, it is not allowed to go with a sample processed in "PECVD03" to "Si Etch 1: KOH" (our cleanest KOH etch bath) as you sample - might - pick up contaminants of material list 3, such as silver, gold, or copper, and others in the PECVD03. Since those contaminants can alter the etching process and further contaminate samples processed in "Si Etch 1: KOH", they are forbidden. | |||