LabAdviser/Courses/TPT Ebeam: Difference between revisions
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'''Creating the sdf and jdf files''' | '''Creating the sdf and jdf files''' | ||
To prepare the jdf and sdf files, we normally recommend using SuperEdi. It is a freeware and you can download [https://www.wolosoft.com/en/superedi/ here]. You can find detailed explanation of how to create the *.jdf and *.sdf files under [[Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation|JEOL Job Preparation]]. You will also find some examples of the files and explanation of the different commands. To make the most of the training, we recommend you to try prepareing your *.jdf and *.sdf files before the files training. We will go through the files and discuss any possible mistakes. | To prepare the jdf and sdf files, we normally recommend using SuperEdi. It is a freeware and you can download [https://www.wolosoft.com/en/superedi/ '''here''']. You can find detailed explanation of how to create the *.jdf and *.sdf files under [[Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation|'''JEOL Job Preparation''']]. You will also find some examples of the files and explanation of the different commands. To make the most of the training, we recommend you to try prepareing your *.jdf and *.sdf files before the files training. We will go through the files and discuss any possible mistakes. | ||
There is more information on our electron beam lithography equipment available on Labadviser. Please feel free to browse through the information and do not hestiate to contact us at | There is more information on our electron beam lithography equipment available on Labadviser. Please feel free to browse through the information and do not hestiate to contact us at [Mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk] if you have any questions. | ||