Specific Process Knowledge/Wafer cleaning/Bring samples into cleanroom: Difference between revisions

You must obtain permission from our Fabrication Support team to bring any substrates from outside into our cleanroom. You need to fill out the form [https://labmanager.dtu.dk/view_binary.php?fileId=5457 "'''Request to bring Samples into CR v1.51"'''] and submit it to [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]. Please note that permission is granted on an individual basis. This means that each user must request permission separately. However, you may use an existing request form from a colleague.  

Substrates manufactured or processed from other cleanroom environments with similar or higher level of cleaniness might be taken into our cleanroom without cleaning (but still require granted permission). Other samples must be cleaned using our standard cleaning method described below. Exceptions may be possible, depending on your substrate and the equipment you would like to use.

 

To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum, it is generally not allowed to bring substrates processed outside the cleanroom into the cleanroom, e.g. after dicing. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so.

 

'''Standard Cleaning Process for the approved substrates'''

If the samples can not handle this cleaning procedure, it must be specified in the request form and an alternative cleaning process must be suggested by the user.