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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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Bureaucrats, danchip, Administrators
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Line 127: Line 127:
| Std. Dev||7||6||4||3||2||2||2||3||1
| Std. Dev||7||6||4||3||2||2||2||3||1
|-
|-
! colspan="10" align="center"| Botton curvature
! colspan="10" align="center"| Bottom curvature
|-
|-
| Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39
| Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39
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