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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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! colspan="9" align="center"| Etch rates (nm/min)
! colspan="10" align="center"| Etch rates (nm/min)
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| Averages||295||228||299||235||183||183||166||160||148
| Averages||295||228||299||235||183||183||166||160||148
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