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Line 197: |
| *[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]] | | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]] |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] | | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] |
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| {| border="2" cellspacing="1" cellpadding="3" align="center"
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| !Recipe Sinano
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|3.0]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|3.3]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|3.4]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|4.0]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|3.5]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|3.6]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33-2|3.3]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan37|3.7]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331|3.31]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331-2|3.31]]
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| ![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]]
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| |-
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| ! rowspan="2" align="center"| Etch rates
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| | (nm/min)
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| |-
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| | Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
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| |-
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| | Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12
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| |-
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| ! colspan="14" align="center"| Zep etch rate (nm/min)
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| |-
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| | || ||30||40||51||67|| || ||45||59|| ||53||36||19
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| |-
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| ! colspan="14" align="center"| Sidewall angle (degrees)
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| |-
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| | Averages||82||82||82||82||82||84||81||83||83||85||80||83||79
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| |-
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| | Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2
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| |-
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| ! colspan="14" align="center"| CD loss (nm pr edge)
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| |-
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| | Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
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| |-
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| | Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10
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| |-
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| ! colspan="14" align="center"| Bowing (nm)
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| |-
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| | Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2
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| |-
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| | Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2
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| |-
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| ! colspan="14" align="center"| Botton curvature
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| |-
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| | Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10
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| |-
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| | Std. Dev||22||19||19||11||7||17||15||15||12||15||13||17||18
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| |-
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| |}
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