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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]]
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! colspan="14" align="center"| Etch rates (nm/min)
! rowspan="2" align="center"| Etch rates  
| (nm/min)
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| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
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