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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]]
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]]
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]]
{| border="2" cellspacing="1" cellpadding="3" align="center"
!Recipe Sinano
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|3.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|3.4]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|4.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|3.5]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|3.6]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33-2|3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan37|3.7]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331-2|3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]]
|-
! colspan="14" align="center"| Etch rates (nm/min)
|-
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
|-
| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12
|-
! colspan="14" align="center"| Zep etch rate (nm/min)
|-
| || ||30||40||51||67|| || ||45||59|| ||53||36||19
|-
! colspan="14" align="center"| Sidewall angle (degrees)
|-
| Averages||82||82||82||82||82||84||81||83||83||85||80||83||79
|-
| Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2
|-
! colspan="14" align="center"| CD loss (nm pr edge)
|-
| Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
|-
| Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10
|-
! colspan="14" align="center"| Bowing (nm)
|-
| Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2
|-
| Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2
|-
! colspan="14" align="center"| Botton curvature
|-
| Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10
|-
| Std. Dev||22||19||19||11||7||17||15||15||12||15||13||17||18
|-
|}

Revision as of 20:56, 10 May 2011

Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus


Recipe Sinano 3.0 3.1 3.2 3.3 3.4 4.0 3.5 3.6 3.3 3.7 3.31 3.31 3.32
Cl2 (sccm) 0 0 0 0 0 20 15 15 0 0 0 0 0
BCl3 (sccm) 5 3 5 5 5 0 5 5 5 5 5 5 5
HBr (sccm) 15 17 15 15 15 0 0 0 15 15 15 15 15
Coil power (W) 900 L 900 F 900 F 900 F 900 F 900 L 900 L 900 F 900 F 900 L 900 F 900 F 900 F
Platen power (W) 50 50 60 75 90 60 60 60 75 60 75 75 30
Pressure (mtorr) 2 2 2 2 2 2 5 10 2 10 2 2 2
Temperature (oC) 20 20 20 20 20 20 20 20 20 50 50 50 50
Spacers (mm) 100 100 100 100 100 100 100 100 100 100 100 30 100
Process time (s) 150 180 120 180 120 90 120 180 300 180 180 180 180
Etch rates (nm/min)
Averages 311 104 92 105 116 169 108 79 101 66 91 98 59
Std. Dev 44 15 15 21 22 9 11 31 29 4 28 18 12
Zep etch rate (nm/min)
30 40 51 67 45 59 53 36 19
Sidewall angle (degrees)
Averages 82 82 82 82 82 84 81 83 83 85 80 83 79
Std. Dev 2 2 1 1 1 1 1 2 2 1 3 2 2
CD loss (nm pr edge)
Averages 65 -11 -15 -2 -11 67 63 -29 -5 -29 10 -14 -17
Std. Dev 30 5 2 4 3 29 27 6 5 8 7 8 10
Bowing (nm)
Averages 31 31 15 6 5 22 12 15 28 13 25 1 -2
Std. Dev 6 7 3 6 4 5 2 6 9 7 5 2 2
Botton curvature
Averages -9 -6 -9 -11 -9 9 -4 -8 -24 -2 -9 -13 -10
Std. Dev 22 19 19 11 7 17 15 15 12 15 13 17 18



Recipe Sinano 3.0 3.1 3.2 3.3 3.4 4.0 3.5 3.6 3.3 3.7 3.31 3.31 3.32
Etch rates (nm/min)
Averages 311 104 92 105 116 169 108 79 101 66 91 98 59
Std. Dev 44 15 15 21 22 9 11 31 29 4 28 18 12
Zep etch rate (nm/min)
30 40 51 67 45 59 53 36 19
Sidewall angle (degrees)
Averages 82 82 82 82 82 84 81 83 83 85 80 83 79
Std. Dev 2 2 1 1 1 1 1 2 2 1 3 2 2
CD loss (nm pr edge)
Averages 65 -11 -15 -2 -11 67 63 -29 -5 -29 10 -14 -17
Std. Dev 30 5 2 4 3 29 27 6 5 8 7 8 10
Bowing (nm)
Averages 31 31 15 6 5 22 12 15 28 13 25 1 -2
Std. Dev 6 7 3 6 4 5 2 6 9 7 5 2 2
Botton curvature
Averages -9 -6 -9 -11 -9 9 -4 -8 -24 -2 -9 -13 -10
Std. Dev 22 19 19 11 7 17 15 15 12 15 13 17 18
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