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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
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|-
|-
! Coil power (W)
! Coil power (W)
|800 (forward)
|800 (F)
|600 (forward)
|600 (F)  
|800 (forward)
|800 (F)  
|600 (forward)
|600 (F)
|800 (forward)
|800 (F)
|800 (forward)
|800 (F)  
|800 (forward)
|800 (F)  
|800 (forward)
|800 (F)  
|800 (forward)
|800 (F)  
|-
|-
!Platen power (W)
!Platen power (W)
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